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Proceedings Paper

One-step microfabrication of fused silica by laser-induced pseudo-wet-etching at ambient pressure
Author(s): Jun Wang; Hiroyuki Niino; Akira Yabe
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Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, ; doi: 10.1117/12.995643
Show Author Affiliations
Jun Wang, National Institute of Materials and Chemical Research (Japan)
Hiroyuki Niino, National Institute of Materials and Chemical Research (Japan)
Akira Yabe, National Institute of Materials and Chemical Research (Japan)


Published in SPIE Proceedings Vol. 3618:
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV
Jan J. Dubowski; Henry Helvajian; Ernst-Wolfgang Kreutz; Koji Sugioka, Editor(s)

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