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Proceedings Paper

Surface error and roughness measurement of a spherical optical element by thin laser beam
Author(s): Guilin Sun; Xiaoxing Zhang; X. Q. Zhang; B. G. Wang
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Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, ; doi: 10.1117/12.995154
Show Author Affiliations
Guilin Sun, Beijing Institute of Machinery Industry (China)
Xiaoxing Zhang, Beijing Institute of Machinery Industry (China)
X. Q. Zhang, Beijing Institute of Machinery Industry (China)
B. G. Wang, Beijing Institute of Machinery Industry (China)


Published in SPIE Proceedings Vol. 3558:
Automated Optical Inspection for Industry: Theory, Technology, and Applications II
Shenghua Ye, Editor(s)

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