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Proceedings Paper

Preparation of A1N thin films by reactively pulsed-laser ablation with nitrogen glow assisted
Author(s): Honghai Wang; Qiguang Zheng
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Proc. SPIE 3550, Laser Processing of Materials and Industrial Applications II, ; doi: 10.1117/12.995010
Show Author Affiliations
Honghai Wang, Huazhong Univ. of Science and Technology (China)
Qiguang Zheng, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 3550:
Laser Processing of Materials and Industrial Applications II
ShuShen Deng; S. C. Wang, Editor(s)

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