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Proceedings Paper

Gas detection using a solid-state micro-fabricated thermal gas sensor
Author(s): Cyro Ketzer Saul; Jay N. Zemel
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Paper Details

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Proc. SPIE 3514, Micromachined Devices and Components IV, ; doi: 10.1117/12.994657
Show Author Affiliations
Cyro Ketzer Saul, Univ. Federal do Rio Grande do Sul (Brazil)
Jay N. Zemel, Univ. of Pennsylvania (United States)


Published in SPIE Proceedings Vol. 3514:
Micromachined Devices and Components IV
Patrick J. French; Kevin H. Chau, Editor(s)

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