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Proceedings Paper

Use of "current signatures" for defect diagnosis
Author(s): Anne E. Gattiker; Thomas Vogels; Phil Nigh; Wojciech P. Maly
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Proc. SPIE 3510, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV, ; doi: 10.1117/12.994634
Show Author Affiliations
Anne E. Gattiker, Carnegie Mellon Univ. (United States)
Thomas Vogels, Carnegie Mellon Univ. (United States)
Phil Nigh, IMB Microelectronics (United States)
Wojciech P. Maly, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 3510:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV
Sharad Prasad; Hans-Dieter Hartmann; Tohru Tsujide, Editor(s)

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