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Proceedings Paper

Non contact conductivity and resistivity measurements using infrared spectroscopic ellipsometry
Author(s): Pierre Boher; Michel Luttmann; Jean-Louis P. Stehle
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Proc. SPIE 3506, Microelectronic Device Technology II, ; doi: 10.1117/12.994607
Show Author Affiliations
Pierre Boher, SOPRA S.A. (France)
Michel Luttmann, SOPRA S.A. (France)
Jean-Louis P. Stehle, SOPRA S.A. (France)


Published in SPIE Proceedings Vol. 3506:
Microelectronic Device Technology II
David Burnett; Dirk Wristers; Toshiaki Tsuchiya, Editor(s)

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