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Proceedings Paper

Calibration method for multilevel diffractive optical element
Author(s): Yongqi Fu
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Proc. SPIE 3450, Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications, ; doi: 10.1117/12.994213
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Yongqi Fu, Changchun Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 3450:
Theory and Practice of Surface-Relief Diffraction Gratings: Synchrotron and Other Applications
Wayne R. McKinney; Christopher A. Palmer, Editor(s)

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