Share Email Print
cover

Proceedings Paper

Index of refraction and thermal coefficient of optical materials near 193 nm
Author(s): Rajeev Gupta; John H. Burnett; Ulf Griesmann; James R. Roberts; Joseph L. Dehmer
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 3334, Optical Microlithography XI, ; doi: 10.1117/12.993193
Show Author Affiliations
Rajeev Gupta, National Institute of Standards and Technology (United States)
John H. Burnett, National Institute of Standards and Technology (United States)
Ulf Griesmann, National Institute of Standards and Technology (United States)
James R. Roberts, National Institute of Standards and Technology (United States)
Joseph L. Dehmer, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 3334:
Optical Microlithography XI
Luc Van den Hove, Editor(s)

© SPIE. Terms of Use
Back to Top