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Proceedings Paper

Determination of the curing state of photoresists by refractive index measurements
Author(s): Stanley A. Ficner; Ralph R. Dammel
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Proc. SPIE 3333, Advances in Resist Technology and Processing XV, ; doi: 10.1117/12.993183
Show Author Affiliations
Stanley A. Ficner, Clariant Corp. (United States)
Ralph R. Dammel, Clariant Corp. (United States)


Published in SPIE Proceedings Vol. 3333:
Advances in Resist Technology and Processing XV
Will Conley, Editor(s)

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