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Proceedings Paper

Optical wafer characterization using computer-generated holograms
Author(s): Shadi Alex AbuGhazaleh; Phillip Christie
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Proc. SPIE 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II, ; doi: 10.1117/12.992764
Show Author Affiliations
Shadi Alex AbuGhazaleh, Univ. of Delaware (United States)
Phillip Christie, Univ. of Delaware (United States)


Published in SPIE Proceedings Vol. 3275:
Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II
John C. Stover, Editor(s)

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