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Proceedings Paper

Fatigue fracture test of MEMS structures
Author(s): Won Kyu Moon; Y. Eugene Pak
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Proc. SPIE 3242, Smart Electronics and MEMS, ; doi: 10.1117/12.992333
Show Author Affiliations
Won Kyu Moon, Samsung Advanced Institute of Technology (South Korea)
Y. Eugene Pak, Samsung Advanced Institute of Technology (South Korea)


Published in SPIE Proceedings Vol. 3242:
Smart Electronics and MEMS
Alex Hariz; Vijay K. Varadan; Olaf Reinhold, Editor(s)

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