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Proceedings Paper

Adhesion between PMMA mask layer and silicon wafer in KOH aqueous solution
Author(s): Mihaela Ilie; Aida El-Kholi; Nicolae Moldovan
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Paper Details

Date Published:
Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, ; doi: 10.1117/12.992261
Show Author Affiliations
Mihaela Ilie, National Institute of Microtechnology (Italy)
Aida El-Kholi, Institute fuer Mikrostrukturtechnik (Germany)
Nicolae Moldovan, National Institute of Microtechnology (Romania)

Published in SPIE Proceedings Vol. 3225:
Microlithography and Metrology in Micromachining III
Craig R. Friedrich; Akira Umeda, Editor(s)

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