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Proceedings Paper

Smart wireless micromachined accelerometers
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Proc. SPIE 3224, Micromachined Devices and Components III, ; doi: 10.1117/12.992255
Show Author Affiliations
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 3224:
Micromachined Devices and Components III
Kevin H. Chau; Patrick J. French, Editor(s)

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