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Proceedings Paper

Processing and failure analysis of ISFET devices
Author(s): Ruediger Ferretti
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Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, ; doi: 10.1117/12.992245
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Ruediger Ferretti, Institut fuer Halbleitertechnologie und Werkstoffe der Elektrotechnik (Germany)


Published in SPIE Proceedings Vol. 3216:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III
Ali Keshavarzi; Sharad Prasad; Hans-Dieter Hartmann, Editor(s)

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