Share Email Print
cover

Proceedings Paper

Experimental verification of optimally controlled chemical vapor deposition
Author(s): John J. Kristof; K. S. Tsakalis; L. J. Song; Timothy S. Cale
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 3213, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III, ; doi: 10.1117/12.992219
Show Author Affiliations
John J. Kristof, Arizona State Univ. (United States)
K. S. Tsakalis, Arizona State Univ. (United States)
L. J. Song, Arizona State Univ. (United States)
Timothy S. Cale, Arizona State Univ. (United States)


Published in SPIE Proceedings Vol. 3213:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III
Abe Ghanbari; Anthony J. Toprac, Editor(s)

© SPIE. Terms of Use
Back to Top