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Proceedings Paper

Microfabrication technology for optical devices, microsensors, and field emitters
Author(s): Stella W. Pang
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Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, ; doi: 10.1117/12.992139
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Stella W. Pang, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 3184:
Microelectronic Packaging and Laser Processing

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