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Proceedings Paper

Development of an excimer-laser-driven x-ray source: applications to soft x-ray lithography
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Paper Details

Date Published:
Proc. SPIE 3048, Emerging Lithographic Technologies, ; doi: 10.1117/12.991280
Show Author Affiliations
Vincenzo Nassisi, National Institute for Nuclear Physics (Italy)
Alexandru Hening, Atomic Physics Institute (Romania)

Published in SPIE Proceedings Vol. 3048:
Emerging Lithographic Technologies
David E. Seeger, Editor(s)

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