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Proceedings Paper

Synthesis of Si nanoclusters in inert and reactive atmosphere by UV pulsed laser ablation
Author(s): Vladimir I. Marine; S. Uglov; L. Patrone; L. Seve; Marc L. Sentis
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Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, ; doi: 10.1117/12.990852
Show Author Affiliations
Vladimir I. Marine, CNRS (France)
S. Uglov, CNRS (France)
L. Patrone, CNRS (France)
L. Seve, CNRS (France)
Marc L. Sentis, CNRS (France)


Published in SPIE Proceedings Vol. 2991:
Laser Applications in Microelectronic and Optoelectronic Manufacturing II
Jan J. Dubowski, Editor(s)

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