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Proceedings Paper

Data available from extended performance hemispherical directional reflectometer (HDR)
Author(s): Michael T. Beecroft; Paul McKenna; John Ternay Neu
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Date Published:
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Proc. SPIE 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries, ; doi: 10.1117/12.987669
Show Author Affiliations
Michael T. Beecroft, Surface Optics Corp. (United States)
Paul McKenna, Surface Optics Corp. (United States)
John Ternay Neu, Surface Optics Corp. (United States)


Published in SPIE Proceedings Vol. 2541:
Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries
John C. Stover, Editor(s)

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