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Proceedings Paper

Fifth-order aberration evaluation for electron-beam writing systems
Author(s): Yasumichi Uno; Hirofumi Morita; Kenichi Saito; Nobuo Shimazu
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Paper Details

Date Published:
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, ; doi: 10.1117/12.987495
Show Author Affiliations
Yasumichi Uno, NTT LSI Labs. (Japan)
Hirofumi Morita, NTT LSI Labs. (Japan)
Kenichi Saito, NTT LSI Labs. (Japan)
Nobuo Shimazu, NTT LSI Labs. (Japan)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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