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Proceedings Paper

Mechanical properties of polysilicon-based composite films
Author(s): Frank A. Shemansky; Lj. Ristic; Dan N. Koury; Ron J. Gutteridge
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Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, ; doi: 10.1117/12.987036
Show Author Affiliations
Frank A. Shemansky, Motorola, Inc. (United States)
Lj. Ristic, Motorola, Inc. (United States)
Dan N. Koury, Motorola, Inc. (United States)
Ron J. Gutteridge, Motorola, Inc. (United States)


Published in SPIE Proceedings Vol. 2448:
Smart Structures and Materials 1995: Smart Electronics
Vijay K. Varadan, Editor(s)

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