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Proceedings Paper

Double-focus interferometer for scanning force microscope
Author(s): Yongmo Zhuo; Yong-Mei Liu
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Date Published:
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Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, ; doi: 10.1117/12.986955
Show Author Affiliations
Yongmo Zhuo, Zhejiang Univ. (China)
Yong-Mei Liu, Zhejiang Univ. (United States)


Published in SPIE Proceedings Vol. 2439:
Integrated Circuit Metrology, Inspection, and Process Control IX
Marylyn Hoy Bennett, Editor(s)

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