Share Email Print
cover

Proceedings Paper

Laser chemical etching of silicon and IV-IV alloys
Author(s): Jacques Boulmer; B. Bourguignon; A. Aliouchouche; D. Debarre; Jean-Pierre Budin
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 2403, Laser-Induced Thin Film Processing, ; doi: 10.1117/12.986798
Show Author Affiliations
Jacques Boulmer, Univ. de Paris-Sud (France)
B. Bourguignon, Univ. de Paris-Sud (France)
A. Aliouchouche, Univ. de Paris-Sud (France)
D. Debarre, Univ. de Paris-Sud (France)
Jean-Pierre Budin, Univ. de Paris-Sud (France)


Published in SPIE Proceedings Vol. 2403:
Laser-Induced Thin Film Processing
Jan J. Dubowski, Editor(s)

© SPIE. Terms of Use
Back to Top