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Proceedings Paper

Laser chemical etching of silicon and IV-IV alloys
Author(s): Jacques Boulmer; B. Bourguignon; A. Aliouchouche; D. Debarre; Jean-Pierre Budin
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Paper Details

Date Published:
Proc. SPIE 2403, Laser-Induced Thin Film Processing, ; doi: 10.1117/12.986798
Show Author Affiliations
Jacques Boulmer, Univ. de Paris-Sud (France)
B. Bourguignon, Univ. de Paris-Sud (France)
A. Aliouchouche, Univ. de Paris-Sud (France)
D. Debarre, Univ. de Paris-Sud (France)
Jean-Pierre Budin, Univ. de Paris-Sud (France)

Published in SPIE Proceedings Vol. 2403:
Laser-Induced Thin Film Processing
Jan J. Dubowski, Editor(s)

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