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Design, focused-ion-beam patterning, and characterization of mulitlevel diffractive optics elements
Author(s): Peter Kung; Claude Beaulieu; Li Song; Ian M. Templeton; Earl J. Fjarlie; Marc Vemeault; Kelvin E. Hamilton; J. R. Michel Codere; Michael Babec
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Proc. SPIE 2152, Diffractive and Holographic Optics Technology, ; doi: 10.1117/12.985416
Show Author Affiliations
Peter Kung, QP Semiconductor Technology Inc. (Canada)
Claude Beaulieu, QP Semiconductor Technology Inc. (Canada)
Li Song, QP Semiconductor Technology Inc. (Canada)
Ian M. Templeton, National Research Council of Canada (Canada)
Earl J. Fjarlie, Royal Military College of Canada (Canada)
Marc Vemeault, Royal Military College of Canada (Canada)
Kelvin E. Hamilton, Royal Military College of Canada (Canada)
J. R. Michel Codere, Royal Military College of Canada (Canada)
Michael Babec, Royal Military College of Canada (Canada)


Published in SPIE Proceedings Vol. 2152:
Diffractive and Holographic Optics Technology
Ivan Cindrich; Sing H. Lee, Editor(s)

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