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Proceedings Paper

Single-wafer gas-phase doping of silicon
Author(s): Ahmad Kermani; Kristian E. Johnsgard; Carl Galewski
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Proc. SPIE 1804, Rapid Thermal and Laser Processing, ; doi: 10.1117/12.983360
Show Author Affiliations
Ahmad Kermani, AG Associates (United States)
Kristian E. Johnsgard, AG Associates (United States)
Carl Galewski, AG Associates (United States)


Published in SPIE Proceedings Vol. 1804:
Rapid Thermal and Laser Processing
Dim-Lee Kwong; Heinrich G. Mueller, Editor(s)

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