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Proceedings Paper

Layout and reticle verification for FPD
Author(s): Makoto Takagi; Kouji Yamaguchi; Hideki Chida; Tsuneo Munakata; Nobuto Ono
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Paper Abstract

Flat panel display (fpd) design needs further improving of design quality and efficiency due to aggressive market needs like fast growing 3d panel, big screen for tv. In this paper, we explain the specialized verification technology for panel layout, reticle of fpd whcich enable to reduce the respin and design tat.

Paper Details

Date Published: 29 June 2012
PDF: 4 pages
Proc. SPIE 8441, Photomask and Next-Generation Lithography Mask Technology XIX, 84410M (29 June 2012); doi: 10.1117/12.981996
Show Author Affiliations
Makoto Takagi, Jedat Inc. (Japan)
Kouji Yamaguchi, Jedat Inc. (Japan)
Hideki Chida, Jedat Inc. (Japan)
Tsuneo Munakata, Jedat Inc. (Japan)
Nobuto Ono, Jedat Inc. (Japan)

Published in SPIE Proceedings Vol. 8441:
Photomask and Next-Generation Lithography Mask Technology XIX
Kokoro Kato, Editor(s)

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