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Proceedings Paper

Miniaturization as a key factor to the development and application of advanced metrology systems
Author(s): Cosme Furlong; Ivo Dobrev; Ellery Harrington; Peter Hefti; Morteza Khaleghi
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Paper Abstract

Recent technological advances of miniaturization engineering are enabling the realization of components and systems with unprecedented capabilities. Such capabilities, which are significantly beneficial to scientific and engineering applications, are impacting the development and the application of optical metrology systems for investigations under complex boundary, loading, and operating conditions. In this paper, and overview of metrology systems that we are developing is presented. Systems are being developed and applied to high-speed and high-resolution measurements of shape and deformations under actual operating conditions for such applications as sustainability, health, medical diagnosis, security, and urban infrastructure. Systems take advantage of recent developments in light sources and modulators, detectors, microelectromechanical (MEMS) sensors and actuators, kinematic positioners, rapid prototyping fabrication technologies, as well as software engineering.

Paper Details

Date Published: 11 September 2012
PDF: 12 pages
Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130T (11 September 2012); doi: 10.1117/12.981668
Show Author Affiliations
Cosme Furlong, Worcester Polytechnic Institute (United States)
Ivo Dobrev, Worcester Polytechnic Institute (United States)
Ellery Harrington, Worcester Polytechnic Institute (United States)
Peter Hefti, Worcester Polytechnic Institute (United States)
Morteza Khaleghi , Worcester Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 8413:
Speckle 2012: V International Conference on Speckle Metrology
Ángel Fernandez Doval; Cristina Trillo, Editor(s)

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