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Proceedings Paper

Status of the AIMS(TM) EUV Project
Author(s): Anthony D. Garetto; Jan Hendrik Peters; Sascha Perlitz; Ulrich Matejka; Dirk Hellweg; Markus R. Weiss
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Paper Abstract

In previous conferences the status of the AIMS™ EUV project has been presented in which the basic layout scheme and preliminary design have been shown along with the targeted performance specification levels to be met. Presently the final design milestone of the project has been successfully completed and assembly of the prototype tool is underway. The final design concept will be presented along with the current status of the tool and simulated performance data.

Paper Details

Date Published: 8 November 2012
PDF: 9 pages
Proc. SPIE 8522, Photomask Technology 2012, 852220 (8 November 2012); doi: 10.1117/12.981345
Show Author Affiliations
Anthony D. Garetto, Carl Zeiss SMS (Germany)
Jan Hendrik Peters, Carl Zeiss SMS (Germany)
Sascha Perlitz, Carl Zeiss SMS (Germany)
Ulrich Matejka, Carl Zeiss SMS (Germany)
Dirk Hellweg, Carl Zeiss SMT (Germany)
Markus R. Weiss, Carl Zeiss SMT (Germany)

Published in SPIE Proceedings Vol. 8522:
Photomask Technology 2012
Frank E. Abboud; Thomas B. Faure, Editor(s)

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