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Proceedings Paper

In situ aberration measurement technique based on aerial image with optimized source
Author(s): Guanyong Yan; Xiangzhao Wang; Sikun Li; Jishuo Yang; Dongbo Xu; Lifeng Duan; Anatoly Y. Bourov; Andreas Erdmann
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Paper Abstract

An in-situ aberration measurement technique based on aerial image with optimized source is proposed. A linear relationship between aerial image and Zernike coefficients is established by principle component analysis and regression analysis. The linear relationship is used to extract aberrations. The impacts of the source on regression matrix character and the Zernike aberrations measurement accuracy are analyzed. An evaluation function for the aberrations measurement accuracy is introduced to optimize the source. Parameters of the source are optimized by the evaluation function using the simulators Dr.LiTHO and PROLITH. Then the optimized source parameters are adopted in our method. Compared with the previous aberration measurement technique based on principal component analysis of aerial image (AMAI-PCA), the number terms of Zernike coefficients that can be measured are increased from 7 to 27, and the Zernike aberrations measurement accuracy is improved by more than 20%.

Paper Details

Date Published: 18 December 2012
PDF: 12 pages
Proc. SPIE 8550, Optical Systems Design 2012, 85503N (18 December 2012); doi: 10.1117/12.981334
Show Author Affiliations
Guanyong Yan, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of the Chinese Academy of Sciences (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Sikun Li, Shanghai Institute of Optics and Fine Mechanics (China)
Jishuo Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of the Chinese Academy of Sciences (China)
Dongbo Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Lifeng Duan, Shanghai Micro Electronics Equipment Co., Ltd. (China)
Anatoly Y. Bourov, Shanghai Micro Electronics Equipment Co., Ltd. (China)
Andreas Erdmann, Fraunhofer-Institut für Integrierte System und Bauelementetechnologie (Germany)


Published in SPIE Proceedings Vol. 8550:
Optical Systems Design 2012
Laurent Mazuray; Rolf Wartmann; Andrew P. Wood; Marta C. de la Fuente; Jean-Luc M. Tissot; Jeffrey M. Raynor; Daniel G. Smith; Frank Wyrowski; Andreas Erdmann; Tina E. Kidger; Stuart David; Pablo Benítez, Editor(s)

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