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Proceedings Paper

High-speed surface slope measuring profiler for aspheric shapes
Author(s): Hiroki Matsumura; Koji Usuki; Takao Kitayama; Hiroki Matsumura; Takuya Kojima; Junichi Uchikoshi; Yasuo Higashi; Tatsuya Kume; Kazuhiro Enami; Katsuyoshi Endo
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Paper Abstract

A new high-speed slope measuring instrument is currently under development for small-aperture aspheric lenses and mirrors. In the present study, normal vectors at each point on the lens surface were determined using the reflected light beam that follows the same path as the incident beam. The capability of the developed instrument to achieve submicroradian surface slope metrology of a small-radius aspheric lens was verified. The paper also describes in detail the design principle, aspheric lens measuring method, initial alignment and calibration procedure, shape determination procedure developed from the measured slope metrology, and the high-speed slope measuring technique.

Paper Details

Date Published: 18 December 2012
PDF: 7 pages
Proc. SPIE 8550, Optical Systems Design 2012, 85501W (18 December 2012); doi: 10.1117/12.981154
Show Author Affiliations
Hiroki Matsumura, Osaka Univ. (Japan)
Koji Usuki, Osaka Univ. (Japan)
Takao Kitayama, Osaka Univ. (Japan)
Hiroki Matsumura, Osaka Univ. (Japan)
Takuya Kojima, Osaka Univ. (Japan)
Junichi Uchikoshi, Osaka Univ. (Japan)
Yasuo Higashi, High Energy Accelerator Research Organization (Japan)
Tatsuya Kume, High Energy Accelerator Research Organization (Japan)
Kazuhiro Enami, High Energy Accelerator Research Organization (Japan)
Katsuyoshi Endo, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 8550:
Optical Systems Design 2012
Laurent Mazuray; Rolf Wartmann; Andrew P. Wood; Marta C. de la Fuente; Jean-Luc M. Tissot; Jeffrey M. Raynor; Daniel G. Smith; Frank Wyrowski; Andreas Erdmann; Tina E. Kidger; Stuart David; Pablo Benítez, Editor(s)

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