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Proceedings Paper

A global sub-aperture stitching algorithm and its precision evaluation
Author(s): Guangda Zhan; Xudong Xu; Zhengxiang Shen; Xiaoqiang Wang; ZhanShan Wang; Huasong Liu; Yiqin Ji
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Paper Abstract

Sub-aperture stitching interferometry is a method to test the surface of the large optics, which can effectively extend the lateral range of the standard interferometer and can also enhance its lateral resolution. The stitching algorithm based on the overlapping area plays a very important role in sub-aperture stitching interferometry. Due to the misalignment in the sub-aperture test cycle, relatively tilt and shift are calibrated. And the global stitching method is applied to minimize the differences of phase distributions in the overlapping areas. The inspection of stitching quality of the overlapping area is also necessary after the interferograms which have been stitched. This paper uses the statistical principle to evaluate the quality of the overlapping area.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841742 (15 October 2012); doi: 10.1117/12.979608
Show Author Affiliations
Guangda Zhan, Tongji Univ. (China)
Xudong Xu, Tongji Univ. (China)
Zhengxiang Shen, Tongji Univ. (China)
Xiaoqiang Wang, Tongji Univ. (China)
ZhanShan Wang, Tongji Univ. (China)
Huasong Liu, Tongji Univ. (China)
Jinhang Institute of Technical Physics (China)
Yiqin Ji, Tongji Univ. (China)
Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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