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Proceedings Paper

Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties
Author(s): Hrishi Shende; SherJang Singh; James Baugh; Uwe Dietze; Peter Dress
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Paper Abstract

As the feature size of the mask shrinks, the feature becomes more fragile and the potential for physical force damage during cleaning increases. At the same time, increased feature density of the mask makes it difficult to remove particles from congested trenches without physical force cleaning. Acoustic energy has the ability to suppress the hydro-dynamic boundary layer thereby transferring the physical force impact closer to particles trapped in the deep trenches of the mask. MegaSonic, which employs acoustic energy, is a preferred physical force cleaning technology for advanced masks. However MegaSonic can be extremely aggressive if the energy distribution is not contained within the narrowest process window available. In this paper, liquid media properties and their effect in controlling MegaSonic energy is evaluated. A chemistry is identified which provides favorable gaseous properties for controlling MegaSonic cavitation. The effect of this chemistry is characterized by measuring acoustic energy and Sonoluminscense. The phenomenon is further verified with pattern damage studies.

Paper Details

Date Published: 8 November 2012
PDF: 7 pages
Proc. SPIE 8522, Photomask Technology 2012, 852217 (8 November 2012); doi: 10.1117/12.979342
Show Author Affiliations
Hrishi Shende, MP Mask Technology Ctr., LLC (United States)
SherJang Singh, SUSS MicroTec Inc. (United States)
James Baugh, MP Mask Technology Ctr., LLC (United States)
Uwe Dietze, SUSS MicroTec Inc. (United States)
Peter Dress, SUSS MicroTec Photomask Equipment GmbH & Co. KG (Germany)


Published in SPIE Proceedings Vol. 8522:
Photomask Technology 2012
Frank E. Abboud; Thomas B. Faure, Editor(s)

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