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Proceedings Paper

A Laser Measurement System For Precise And Fast Positioning
Author(s): Sadao Mori; Toshio Akatsu; Chuuichi Miyazaki
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Paper Abstract

A laser measurement system for precise and fast positioning of an object has been developed. When the speed is low, the movement of the object is measured by comparing the phase change of a light reflected by the object with the phase modulated by an electro-optic crystal (an active device by which the optical phase can be controlled by applying a voltage thereto). When the speed is high the movement is measured using a fringe counting technique. The system achieved an accuracy of 4nm, and a maximum allowable measurement speed of 1100mm/s.

Paper Details

Date Published: 1 January 1987
PDF: 10 pages
Proc. SPIE 0818, Current Developments in Optical Engineering II, (1 January 1987); doi: 10.1117/12.978909
Show Author Affiliations
Sadao Mori, Hitachi Mechanical Engineering Research Laboratory (Japan)
Toshio Akatsu, Hitachi Mechanical Engineering Research Laboratory (Japan)
Chuuichi Miyazaki, Hitachi Mechanical Engineering Research Laboratory (Japan)


Published in SPIE Proceedings Vol. 0818:
Current Developments in Optical Engineering II
Robert E. Fischer; Warren J. Smith, Editor(s)

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