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Proceedings Paper

Effect of Annealing on Optical Properties and Structure of the Vanadium Dioxide Thin Films
Author(s): Huiqun Zhu; Yi Li; Yuming Li; Yize Huang; Guoxiang Tong; Baoying Fang; Qiuxin Zheng; Liu Li; Yujian Shen
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Paper Abstract

VO2 thin films were prepared on soda-lime glass substrates by DC magnetron sputtering at room temperature using vanadium target and post annealing in air. X-ray diffraction and FTIR spectroscopy analyses showed that the films obtained at the optimized parameters have high VO2 (011) orientation. Both low temperature deposition and post annealing method were beneficial to grow the nano-films with pure VO2 phase-structure and composition. Metalinsulator transition properties of the VO2 films in terms of infrared transmittance, transmittance variation and film thickness were investigated under varying annealing temperature. Results showed that infrared transmittance variation and transition temperature of the nano-films were significantly improved and reduced respectively. Therefore, this study was able to develop practical low-cost preparation methods for high-performance intelligent energy-saving thin films.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181S (15 October 2012); doi: 10.1117/12.978622
Show Author Affiliations
Huiqun Zhu, Univ. of Shanghai for Science and Technology (China)
Wuyi Univ. (China)
Yi Li, Univ. of Shanghai for Science and Technology (China)
Shanghai Key Lab. of Modern Optical System (China)
Yuming Li, The Affiliated Jiangmen Hospital of Jinan Univ. (China)
Yize Huang, Univ. of Shanghai for Science and Technology (China)
Guoxiang Tong, Univ. of Shanghai for Science and Technology (China)
Baoying Fang, Univ. of Shanghai for Science and Technology (China)
Qiuxin Zheng, Univ. of Shanghai for Science and Technology (China)
Liu Li, Univ. of Shanghai for Science and Technology (China)
Yujian Shen, Univ. of Shanghai for Science and Technology (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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