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Proceedings Paper

Single-shot profilometry of rough surfaces using hyperspectral interferometry
Author(s): Pablo D. Ruiz; Jonathan M. Huntley; Taufiq Widjanarko
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Paper Abstract

The measurement of surface profile is a vital quality control procedure in many industries. For small objects (dimensions below ~10 mm) with rough or discontinuous surfaces, scanning white light interferometry (SWLI) is currently the method of choice. However, with a resolution of ~1 nm, vibration during the scan induces motion artifacts and prevents its routine use on the production line. We present a system that avoids temporal scanning by spectrally splitting the white light interferogram into a set of interferograms at different wavenumbers which are recorded simultaneously on an image sensor. The system essentially consists of an interferometer coupled to a single-shot hyperspectral imaging system. Fourier transformation along the wavenumber axis provides an absolute optical path difference for each point in the field of view, a procedure which is robust even on optically rough surfaces. Height maps with a spatial resolution of 19×19 pixels and a measurement accuracy of ~460 nm are demonstrated.

Paper Details

Date Published: 11 September 2012
PDF: 4 pages
Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130G (11 September 2012); doi: 10.1117/12.978288
Show Author Affiliations
Pablo D. Ruiz, Loughborough Univ. (United Kingdom)
Jonathan M. Huntley, Loughborough Univ. (United Kingdom)
Taufiq Widjanarko, Cranfield Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 8413:
Speckle 2012: V International Conference on Speckle Metrology
Ángel Fernandez Doval; Cristina Trillo, Editor(s)

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