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Proceedings Paper

Computer-aided alignment of off-axis two-mirror reflective system
Author(s): Wang Bin; Wu Fan; Ye Yu Tang
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Paper Abstract

To realize the fast, efficient alignment of off-axis two-mirror reflective system, the scheme of computer-aided alignment has been proposed. The misalignment state of the system has been simulated in Zemax, corresponding relationship between the misalignments and Zernike polynomial coefficients has been analyzed and the misalignment characteristics of the system have been summarized by Matlab. Finally, the alignment scheme was determined by analysis. In order to verify the scheme, an off-axis two-mirror reflective system has been aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible to the system.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84171S (15 October 2012); doi: 10.1117/12.978174
Show Author Affiliations
Wang Bin, Institute of Optics and Electronics (China)
Graduate Univ. of the Chinese Academy of Sciences (China)
Univ. of Electronic Science and Technology of China (China)
Wu Fan, Institute of Optics and Electronics (China)
Ye Yu Tang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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