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Proceedings Paper

Ptychography applied to optical metrology
Author(s): Daniel Claus; David J. Robinson; Derek G. Chetwynd; Shuo Yang; W. Thomas Pike; John M. Rodenburg
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Paper Abstract

This paper introduces ptychography, a novel and very exciting phase retrieval technique, to the field of optical metrology. Its working principle is explained and a useful application in combination with the dual wavelength method for topography measurement is presented. Advantages of the dual wavelength method compared to other optical topography measurement techniques, the experimental procedure and the analysis of the data are discussed.

Paper Details

Date Published: 11 September 2012
PDF: 5 pages
Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130O (11 September 2012); doi: 10.1117/12.977959
Show Author Affiliations
Daniel Claus, Univ. of Sheffield (United Kingdom)
David J. Robinson, Univ. of Warwick (United Kingdom)
Derek G. Chetwynd, Univ. of Warwick (United Kingdom)
Shuo Yang, Imperial College London (United Kingdom)
W. Thomas Pike, Imperial College London (United Kingdom)
John M. Rodenburg, Univ. of Sheffield (United Kingdom)


Published in SPIE Proceedings Vol. 8413:
Speckle 2012: V International Conference on Speckle Metrology
Ángel Fernandez Doval; Cristina Trillo, Editor(s)

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