Share Email Print
cover

Proceedings Paper

Comparison and analysis of three different methods for the paraboloid testing
Author(s): Er-long Miao
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Paraboloid is a special asphere and is widely used in optical system. This paper is focused on the Paraboloid testing error analysis and synthesis in practical. A paraboloid from ZYGO is tested using three different methods which are computer generated hologram (CGH), small ball and multi-zone stitching metrology method. The three methods are realized in a fine controlled lab utilizing ZYGO FIZEAU interferometer and the test results are compared and analyzed. Error synthesis is also performed and the uncertainty of the tests is less than 4.5nm.

Paper Details

Date Published: 15 October 2012
PDF: 8 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841704 (15 October 2012); doi: 10.1117/12.977929
Show Author Affiliations
Er-long Miao, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

© SPIE. Terms of Use
Back to Top