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Proceedings Paper

Automated laser damage threshold test systems of different test modes for optical elements
Author(s): Bin Ma; Yanyun Zhang; Hongping Ma; Huasong Liu; Yiqin Ji
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Paper Abstract

The automated laser damage threshold test systems of different test modes are developed recently with micron-scale damage events automated detection, location and re-inspection. The system is carried out using a 10 ns pulsed Nd:YAG laser with a repetition rate of 10 Hz. In view of the requirements of weak site identification and growth test for initial damage sites, we pay more attention to the raster scan protocol. The automated test system is enabled by the pulsed stage movement method. A one pulse to one image correspondence have been set up during scans, which is available for the later confirmation of the automated damage detection results and the growth study at specified test sites. The new and grown defects are decided by comparing the pre-image and current image at the same place during different scans. Currently, the defect comparison rules and tolerance are being optimized to improve the accuracy of test systems.

Paper Details

Date Published: 4 December 2012
PDF: 8 pages
Proc. SPIE 8530, Laser-Induced Damage in Optical Materials: 2012, 85301P (4 December 2012); doi: 10.1117/12.977448
Show Author Affiliations
Bin Ma, Tongji Univ. (China)
Key Lab. of Advanced Micro-structure Materials (China)
Yanyun Zhang, Tongji Univ. (China)
Key Lab. of Advanced Micro-structure Materials (China)
Hongping Ma, Tongji Univ. (China)
Key Lab. of Advanced Micro-structure Materials (China)
Huasong Liu, Tianjin Jinhang Institute of Technology Physics (China)
Yiqin Ji, Tianjin Jinhang Institute of Technology Physics (China)


Published in SPIE Proceedings Vol. 8530:
Laser-Induced Damage in Optical Materials: 2012
Gregory J. Exarhos; Vitaly E. Gruzdev; Joseph A. Menapace; Detlev Ristau; M J Soileau, Editor(s)

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