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Proceedings Paper

Experimental study on virtual spatially extended source
Author(s): Yan Xu; Yongjian Wan; Yongqian Wu
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Paper Abstract

One of the most important factor in influencing interferometer measurement accuracy is coherent noise .To improve measurement accuracy, the coherent noise of interferometric system should be reduced effectively. A new method of generating virtually extended source is described in this paper, which can suppress coherent noise effectively and verified by experiment. Experiments of comparing with traditional point source show that the virtually extended source can suppress coherent noise effectively and preserve the fringe contrast. There is no Newton rings in the phase map in evidence. The experiments show the wedge angle to be chosen between 8 minutes and 17minutes for a better results. The final measurement about surface profile show the method with virtually extended source has lower RMS value.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84173X (15 October 2012); doi: 10.1117/12.977333
Show Author Affiliations
Yan Xu, Institute of Optics and Electronics (China)
Graduate Univ. of the Chinese Academy of Sciences (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Yongqian Wu, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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