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Proceedings Paper

Study on profiler for big relative aperature aspherical surface
Author(s): Yi Wang; Gufeng Qiu; Jing-Chi Yu
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Paper Abstract

Profiler is a popular metrology system to measure form shape error of aspherical surface, but precise measurement to big relative aperture aspherical surface could not be achieved by traditional profiler with cartesian coordinate system. A new profiler with polar coordinate system based in “small error” thoery is studied in this article. Firstly, the testing error of this new profiler is analized and corrected. Then, the correction capability is vertified by sorting of computer simulated testing results. In the end, the protyping profiler is explored, and the testing results are compared with Form Taylorsurf’s, the accuracy of this new profiler is consistent with predictive analysis. Key words: Profiler, aspherical surface, big relative aperture

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841741 (15 October 2012); doi: 10.1117/12.977257
Show Author Affiliations
Yi Wang, Soochow Univ. (China)
Gufeng Qiu, Soochow Univ. (China)
Jing-Chi Yu, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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