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Proceedings Paper

Analysis of chemical polishing for optical elements
Author(s): Lingyan Jiao; Yuzhu Jin; Nana Lin; Tao Liu; Yi Tong; Dongxun Wu; Changshun Hui
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Paper Abstract

It is impossible to polish the groove or channel’s surface by traditional method. Chemical polishing, using solutions to erode glass, is adopted in this paper with the aim for getting smooth surface. Nature of glass, composition of polishing slurry, type of polishing products, and some process parameters are studied; in the meanwhile, SEM, metallurgical microscope, profile meter and Visible-UV spectrophotometer are utilized. The result shows that the polished surfaces with high quality depend on the buffering effect of polishing solution, high solubility to polishing products, smaller size of generated salt crystal. Also, it is indispensable to select proper temperature, time and removal rate to realize precision polishing.

Paper Details

Date Published: 16 October 2012
PDF: 5 pages
Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84161N (16 October 2012); doi: 10.1117/12.977233
Show Author Affiliations
Lingyan Jiao, Tianjin Jinhang Institute of Technical Physics (China)
Yuzhu Jin, Tianjin Jinhang Institute of Technical Physics (China)
Nana Lin, Tianjin Jinhang Institute of Technical Physics (China)
Tao Liu, Tianjin Jinhang Institute of Technical Physics (China)
Yi Tong, Tianjin Jinhang Institute of Technical Physics (China)
Dongxun Wu, Tianjin Jinhang Institute of Technical Physics (China)
Changshun Hui, Tianjin Jinhang Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 8416:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Eric Ruch; Shengyi Li, Editor(s)

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