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Proceedings Paper

Ion Beam Reduction Of Optical Scatter From Coated Metal Surfaces
Author(s): G. A. Al-Jumaily; J. J. McNally; K. C. Jungling; J. R. McNeil
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Paper Abstract

Deposition of thin (0.2 - 2.0 μm) metal film on a polished metal substrate changes its scatter characteristic. The light scatter due to high spatial frequency structure is reduced by as much as a factor of ten; total integrated scatter is reduced by as much as a factor of four. The effect is strongly influenced by the deposition mechanism employed, film and substrate materials and film thickness. The effect is most apparent when using simultaneous Ar+ bombardment during film deposition (i.e., ion assisted deposition).

Paper Details

Date Published: 20 November 1985
PDF: 7 pages
Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); doi: 10.1117/12.976154
Show Author Affiliations
G. A. Al-Jumaily, University of New Mexico (United States)
J. J. McNally, University of New Mexico (United States)
K. C. Jungling, University of New Mexico (United States)
J. R. McNeil, University of New Mexico (United States)

Published in SPIE Proceedings Vol. 0540:
Southwest Conf on Optics '85
Susanne C. Stotlar, Editor(s)

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