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Proceedings Paper

Thin-Film Microstructure Modeling
Author(s): Liao Bangjun; H. A. Macleod
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Paper Abstract

A model of thin-film growth in which the molecules are represented by hard disks has been implemented on a microcomputer. The effect on film microstructure of variations in relaxation parameter, A, the ratio of mean distance traveled by a molecule after impingement on the film surface to a molecular diameter, has been investigated. Nodular growth has been simulated in single and two-layer systems. Violations of the tangent law of column orientation have been examined.

Paper Details

Date Published: 20 November 1985
PDF: 6 pages
Proc. SPIE 0540, Southwest Conf on Optics '85, (20 November 1985); doi: 10.1117/12.976106
Show Author Affiliations
Liao Bangjun, University of Arizona (United States)
H. A. Macleod, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0540:
Southwest Conf on Optics '85
Susanne C. Stotlar, Editor(s)

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