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Proceedings Paper

Effect of radiation exposure on the surface adhesion of Ru-capped MoSi multilayer blanks
Author(s): Göksel Durkaya; Abbas Rastegar; Hüseyin Kurtuldu
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Paper Abstract

Better understanding of the effect of radiation on defectivity is essential to improve the stability of Ru-capped MoSi multilayer blanks. In this work, the effect of radiation exposure on the surface adhesion properties of Ru-capped MoSi multilayers was studied using optical radiation (172 nm, 532 nm, and 1064 nm). Regardless of wavelength, the surface adhesion of defects increases when exposed to radiation and scales with laser power. Changes in adhesion are compared to surface roughness. For different wavelengths, chemical modification of the surface and optical absorption of defects exhibit different contributions.

Paper Details

Date Published: 8 November 2012
PDF: 6 pages
Proc. SPIE 8522, Photomask Technology 2012, 852214 (8 November 2012); doi: 10.1117/12.976060
Show Author Affiliations
Göksel Durkaya, SEMATECH (United States)
Abbas Rastegar, SEMATECH (United States)
Hüseyin Kurtuldu, SEMATECH (United States)

Published in SPIE Proceedings Vol. 8522:
Photomask Technology 2012
Frank E. Abboud; Thomas B. Faure, Editor(s)

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