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Proceedings Paper

Design of aberration compensation element for the measurement of diffraction efficiency of the beam sampling grating
Author(s): Hao Sun
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Paper Abstract

A diffraction optical element (DOE) is designed to compensate the aberration induced by beam sampling grating (BSG), for analyzing the uniformity of diffraction efficiency of BSG quickly and accurately. So it is suitable for a matrix CCD to receive the aberration-free diffraction beam in the defocusing position directly. The DOE with the same size of the BSG is placed closly to the BSG, and the fringes of the DOE can be obtained by computer generated hologram based on holographic interference. Using genetic algorithm, the spatial frequency of the hologram is determined to meet the process constraint of laser directly writing by changing parameters of the measurement path. The fringe distribution of the hologram for laser direct writing can be calculated according to the iterative algorithm.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172M (15 October 2012); doi: 10.1117/12.975949
Show Author Affiliations
Hao Sun, Soochow Univ. (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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