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Proceedings Paper

Measurement Facilities On A Laser Ionization Mass Spectrometer
Author(s): A. Czitrovszky; P. Jani; P. Juhasz; A. Vertes
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Paper Abstract

Basic parameters of a laser ionization time of flight mass spectrometer (LI-TOF-MS) developed for the microelectronic industry are discussed. The system consists of three parts i.e. optical system, the TilF mass spectrometer with ion reflector and the data acquisition and evaluation system. Laboratory experiments were carried out on carbon foils for calibration purposes.

Paper Details

Date Published: 17 September 1987
PDF: 5 pages
Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); doi: 10.1117/12.975602
Show Author Affiliations
A. Czitrovszky, Central Research Institute for Physics (Hungary)
P. Jani, Central Research Institute for Physics (Hungary)
P. Juhasz, Central Research Institute for Physics (Hungary)
A. Vertes, Central Research Institute for Physics (Hungary)


Published in SPIE Proceedings Vol. 0811:
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Harry L. Stover; Stefan Wittekoek, Editor(s)

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