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Proceedings Paper

Quality Of Microlithographic Projection Lenses
Author(s): Joseph Braat
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Paper Abstract

The quality of a finished objective for microlithographic applications depends on factors like the design data, the material properties and the manufacturing precision which can be achieved. With the paper design of an h-line lens (N.A.=0.38, field diameter 20mm) as a guideline we present data on the quality as predicted by the design and on the imperfections to he expected in a finished product.

Paper Details

Date Published: 17 September 1987
PDF: 9 pages
Proc. SPIE 0811, Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection, (17 September 1987); doi: 10.1117/12.975593
Show Author Affiliations
Joseph Braat, Philips Research Laboratories (Netherlands)


Published in SPIE Proceedings Vol. 0811:
Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection
Harry L. Stover; Stefan Wittekoek, Editor(s)

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