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Proceedings Paper

Detection of moving mirror tilt in Fourier transform infrared spectrometer
Author(s): Xiaojie Sun; Jianwen Hua; Zuoxiao Dai; Xiang Xia; Tao Li; Zhirui Wang
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Paper Abstract

Moving mirror tilt, which causes misalignment of two reflectors, is a key issue in Fourier Transform Infrared Spectrometer (FTIRS). Dynamic alignment system (DAS) is adopted to solve misalignment problem. High precision detection of dynamic misalignment angle is one of the most important steps in DAS, mainly upon which the adjustment performances of DAS depend. A new measuring algorithm is presented which is based on amplitude detecting [1][2] between laser interference signals generated by reference laser source in this paper. Mathematical analysis is described and experiment results are shown. These results show that the measuring precision of 0.6 micro-radians of dynamic tilting angle is achieved with this method. This is a guarantee for a FTIRS to acquire high interference efficiency.

Paper Details

Date Published: 15 October 2012
PDF: 5 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 841724 (15 October 2012); doi: 10.1117/12.975180
Show Author Affiliations
Xiaojie Sun, Shanghai Institute of Technical Physics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Jianwen Hua, Shanghai Institute of Technical Physics (China)
Zuoxiao Dai, Shanghai Institute of Technical Physics (China)
Xiang Xia, Shanghai Institute of Technical Physics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Tao Li, Shanghai Institute of Technical Physics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Zhirui Wang, Shanghai Institute of Technical Physics (China)
Graduate Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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