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Proceedings Paper

Experimental study on absolute test of spherical surfaces with shift-rotation method
Author(s): Weihong Song; Fan Wu; Xi Hou
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Paper Abstract

Absolute test of spherical surfaces has been widely used because of increased demand on metrology accuracy. We demonstrate the validity of an absolute test method with shift and rotation procedure that has been proposed earlier. The method relies on the decomposition of the surface deviations into rotationally asymmetric and symmetric components. The surface deviation measured with the absolute test method of shift-rotation agrees well with that of two-sphere method. The difference of rms is ~0.4nm while the PV is very sensitive to environmental effects.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 84172A (15 October 2012); doi: 10.1117/12.974971
Show Author Affiliations
Weihong Song, Institute of Optics and Electronics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Fan Wu, Institute of Optics and Electronics (China)
Xi Hou, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 8417:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Yudong Zhang; Libin Xiang; Sandy To, Editor(s)

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